?????????? ??????? ????????? ?? ?????????????????? ?????? A3N
Електронний архів Житомирського державного технологічного університету
View Archive Info| Field | Value | |
| Title |
?????????? ??????? ????????? ?? ?????????????????? ?????? A3N
Forming of ohmic contacts to the A3N semiconductor compounds |
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| Creator |
???????, ?.?.
???, ?.?. Sheremet, V.N. Saj, P.O. |
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| Subject |
??????????
GaN AlN InN ??????? ??????? ???????? ?????????????? III-nitrides GaN AlN InN ohmic contact current flow mechanism |
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| Description |
?????????? ?????? ?????????? ??????? ????????? ?? ????????????? ?????????????????? ?????? ?3N: GaN, AlN, InN. ?????????? ?????????? ? ?????????????? ????????? ?????????? ???????? Au-Pd-Ti-Pd-n-GaN, Au-Pd-Ti-Pd-n-AlN ?? Au-Pt-Ti-n-InN/GaN/Al2O3. ???????? ? ?????????? ???????? ?????????????? ?? ????????? ??????????? ? ?????????? ?????????? ?????? ?????? We research forming process of ohmic contacts to the perspective semiconductor compounds ?3N: GaN, AlN, InN. We research structure and electrical properties of contact structures Au-Pd-Ti-Pd-n-GaN, Au-Pd-Ti-Pd-n-AlN and Au-Pt-Ti-n-InN/GaN/Al2O3. Current flow mechanism through conductive dislocations with diffusion charge limitation was discovered and researched in these contact structures. |
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| Date |
2016-03-31T11:05:35Z
2016-03-31T11:05:35Z 2014 |
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| Type |
Article
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| Identifier |
http://eztuir.ztu.edu.ua/123456789/2455
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| Language |
uk
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| Relation |
?????? ????: ?????: ???????? ?????;1(68)
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| Publisher |
????
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