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?????????? ??????? ????????? ?? ?????????????????? ?????? A3N

Електронний архів Житомирського державного технологічного університету

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Title ?????????? ??????? ????????? ?? ?????????????????? ?????? A3N
Forming of ohmic contacts to the A3N semiconductor compounds
 
Creator ???????, ?.?.
???, ?.?.
Sheremet, V.N.
Saj, P.O.
 
Subject ??????????
GaN
AlN
InN
??????? ???????
???????? ??????????????
III-nitrides
GaN
AlN
InN
ohmic contact
current flow mechanism
 
Description ?????????? ?????? ?????????? ??????? ????????? ?? ????????????? ??????????????????
?????? ?3N: GaN, AlN, InN. ?????????? ?????????? ? ?????????????? ????????? ??????????
???????? Au-Pd-Ti-Pd-n-GaN, Au-Pd-Ti-Pd-n-AlN ?? Au-Pt-Ti-n-InN/GaN/Al2O3. ???????? ?
?????????? ???????? ?????????????? ?? ????????? ??????????? ? ?????????? ?????????? ??????
??????
We research forming process of ohmic contacts to the perspective semiconductor compounds ?3N: GaN, AlN, InN. We research structure and electrical properties of contact structures Au-Pd-Ti-Pd-n-GaN, Au-Pd-Ti-Pd-n-AlN and Au-Pt-Ti-n-InN/GaN/Al2O3. Current flow mechanism through conductive dislocations with diffusion charge limitation was discovered and researched in these contact structures.
 
Date 2016-03-31T11:05:35Z
2016-03-31T11:05:35Z
2014
 
Type Article
 
Identifier http://eztuir.ztu.edu.ua/123456789/2455
 
Language uk
 
Relation ?????? ????: ?????: ???????? ?????;1(68)
 
Publisher ????